Brooks Automation Inc., a Chelmsford-based provider of automation, vacuum, and instrumentation services for such industries as semiconductor manufacturing, life sciences, and clean energy, said Monday it has agreed to buy Crossing Automation Inc., a California company that provides automation products to the semiconductor industry.

The $63 million cash deal is subject to adjustment for actual working capital at closing, Brooks said in a press release. The company added that it expects to complete the acquisition by the end of this month.