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Brooks to cut 100 jobs, 29 in Mass.

Brooks Automation Inc., a Chelmsford provider of automation, vacuum, and instrumentation products for such markets as the semiconductor industry, will cut 100 jobs, or 6 percent, of its workforce as it looks to “achieve cost synergies” and increase profits.

The company said Wednesday that 29 of the jobs being cut are in Massachusetts. Brooks will be left with a Bay State head count of 605. Brooks recently acquired Crossing Automation Inc.

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Brooks’ plan includes the elimination of redundant positions and the consolidation of office locations in California, Germany, Korea, Singapore, Taiwan, and China.

Brooks expects to incur about $4 million in cash charges related to the restructuring, most of which will be recognized in the first and second quarters of its fiscal 2013.

Brooks estimates that its combined actions will avoid future annualized costs of about $10 million, not including any restructuring charges.

Chris Reidy can be reached at reidy@globe.com.

Correction: Because of an editing error, the headline on an earlier version of this story incorrectly reported the number of job cuts announced by Brooks Automation Inc. It is 100.

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